This course is designed for those using or are interested in using the FIB or FIB/SEM platforms in academic, governmental, or industrial laboratories in either the physical or biological sciences. Basic ion-solid interaction theory will be introduced and used in describing methods of specimen preparation for SEM, TEM, AFM, Auger, SIMS, and atom probe. FIB/SEM analytical characterization, and milling/deposition techniques for nanotechnology will also be discussed.
thin films of zirconium oxide could enable a next generation of low-voltage and -power nonvolatile memory and other nanoscale devices