Surface immobilization of functional receptors on microfabricated cantilever arrays offers a new paradigm for the development of biosensors based on nanomechanics. Microcantilever-based systems are capable of real-time, multiplexed detection of unlabeled disease markers in extremely small volumes of samples. Currently available fabrication technology will allow the integration of electronic readout and sample introduction into a single unit, decreasing the device size, detection time, and cost. Biosensing technologies based on microfabricated cantilever arrays involving multiple cantilevers, electronic processing, and even local telemetry on a single chip have the potential of satisfying the need for highly sensitive and selective multiple-target detection in very small samples. Here we will review the design and fabrication process of cantilever-based biosensors.

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DOI: 10.1016/S1369-7021(09)70249-4