PI’s Highly Dynamic XY Metrology Stage, L-731. Image credit: PIMotion and precision positioning systems expert PI (Physik Instrumente) L.P. introduces a new compact metrology XY stage – the L-731. The magnetic linear direct drive ensures high velocity and acceleration, ideal for inspection and microscopy.
High Travel Accuracy, Stability
With a travel range of 205mm square and solid velocity to 100mm/sec, the L-731 delivers high accuracy and smooth motion. Precision crossed roller bearings with anti-creep cage assist guarantee superior guiding accuracy (1.5µm straightness for loads up to 20kg).
An integrated optical reference encoder and limit switch provide further positioning control and accuracy for this compact stage with 5nm resolution. DC servo motor versions are available on request.
Specifications, Datasheet, More Information
http://www.pi-usa.us/products/precision_positioning_pi-micos/XY_Precision_Positioning_Stage_Mc.php#L731
Watch Video
https://www.youtube.com/embed/uyAOCdZVu0Y?start=284&rel=0
Applications of the L-731
Fields of applications include automation, semiconductor applications, photonics, bio-nano-technology, metrology, microscopy, micro-manipulation, including cleanroom applications.
Features & Advantages
- Travel Range 205mm x 205mm (8”)
- Sensor Resolution 5nm
- Velocity to 100mm/s
- Load Capacity to 20kg
- Integrated Direct Drive Linear Motors and Linear Encoders
USA / Canada
http://www.pi-usa.us | info@pi-usa.us
East
(508) 832-3456
Midwest
(508) 832-3456
West
(949) 679-9191 (LA Area & Mexico)
(408) 533-0973 (Silicon Valley/Bay Area)
This story is reprinted from material from PI, with editorial changes made by Materials Today. The views expressed in this article do not necessarily represent those of Elsevier.