Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.

The journal addresses the following topics and considers mostly experimental work, or theoretical / simulation work directly linked and supporting experiments in the fields:

  • Microelectronics processing & materials (Lithography, Self-assembly, Plasma Processing, Metallization, 3D Integration, Related Materials?.)
  • Micro-/Nano-engineering / fabrication / technology / manufacturing
  • Nanoelectronic and photonic devices and their fabrication
  • Microsystems, microdevices (e.g., sensors and nanoenergy devices) and their fabrication
  • Microfluidics, life science devices /sensors, as well as integrated Lab-on-a-chip and their fabrication

In detail the topics covered are as follows:

1. Nanolithography and Nanopatterning:

  • Optical Lithography
  • Electron Optical Methods and Systems
  • X-ray Optical Methods and Systems
  • Resists
  • Limits of Nanolithography
  • Nanoimprint Lithography
  • EUV Lithography and Masks
  • Charged Particle Based Lithography and Patterning
  • Nanoimprint Lithography Techniques and Templates
  • Maskless Lithography
  • Emerging Nanopatterning Methods
  • Limits of Nanopatterning

2. Pattern Transfer

  • Ion Technology
  • Plasma Processing
  • Transfer of Pattern with Other Methods
  • Plasma Etching
  • Plasma Nanotechnology
  • Plasma / beam Nanopatterning
  • Plasma Surface Modification of Devices
  • Wet transfer methods

3. Materials

  • Metallization and Barrier Materials
  • Silicon on Insulators
  • Dielectrics (low K and high K)
  • Interconnects
  • New Resist Materials
  • Nanomaterials for Device Fabrication
  • Block Copolymers
  • Polymers and Flexible Substrates
  • Layered (2D) Materials and Related Transferring Techniques

4. Nanometrology, Inspection and Testing

  • Electron Beam Testers
  • Laser Probes
  • Signal and Image Processing
  • Nanometrology
  • AFM and Scanning Probe Measurements

5. Advanced Processing and Nanofabrication

  • Process Integration
  • Three Dimensional Integration
  • Other / Emerging Manufacturing and Fabrication Techniques
  • 3D Printing
  • Rapid Thermal Processing
  • Process Modelling and Simulation
  • Equipment Modelling
  • Laser Assisted Processing
  • Top-Down / Bottom-Up (Self-Assembly) Nanofabrication
  • Growth, Planarization, Cleaning Techniques for Devices
    • Plasma deposition
    • MBE
    • Other growth techniques
    • Planarization and cleaning techniques

6. Advanced Nanoelectronic, Photonic, Sensing, Energy Harvesting, and Fluidic Devices

  • Nanoelectronic, Optoelectronic and Photonic Devices
    • Memristive devices for neuromorphic computing
    • Steep slope or fast switching devices
    • Photonic devices
    • Optoelectronic devices

  • Dimension-sensitive Device Properties
  • Memory Devices

    • Magnetic and spintronic devices

  • Advanced MOS Devices
  • Vacuum Nanoelectronics
  • Flexible / Organic / Molecular Electronics

    • Organic and molecular electronics
    • Flexible electronics
    • Wearable electronics
    • Paper electronics
    • Printed electronics

  • Microdevices, Energy Harvesting Devices and Sensors

    • Physical sensors and actuators
    • Energy harvesting devices

7. Chemical, biological, bioelectronic and fluidic devices. Heterogeneous Micro-Nano and Bio Systems

  • Electro-Mechanical Systems (MEMS, NEMS)
  • Power MEMS
  • Magnetic MEMS
  • Optical and Photonic Systems
  • Micro and Nano Fluidic Devices
  • Pumping / valving devices
  • Mixing devices
  • Separation devices
  • Microreactors
  • Sample preparation devices
  • Fluidic interfaces and integration
  • Miniaturized Devices for Biology, Chemistry, Medicine
  • Biosensors
  • Chemical sensors
  • Biomimetic properties incorporated into devices
  • Bioelectronic devices
  • Micro / nano / bio interface and interconnection devices
  • Lab-on-a-chip, bioMEMS, microTAS
  • DNA / protein chips
  • Cell on chip
  • Organ on chip
  • Biomimetic properties incorporated into systems
  • Bioanalytic, diagnostic systems
  • Microseparation, pretreatment systems
  • On-chip detection systems
  • Environmental and food monitoring systems
  • Microreactors

Manuscripts of 5 (five) types are considered:

  • Review Articles that inform readers of the latest research and advances in nanoelectronics, nanofabrication, micro-nano systems, and applications (authors should e-mail editors with a review proposal and outline before submitting)
  • Accelerated Publications (Letters) that feature exciting research breakthroughs in the field
  • Regular original research papers
  • Short / Technical notes intended for original limited investigations or short description of original industrial or industrially-related research and development work
  • News and Opinions that comment on topical issues or express views on the developments in related fields, or comment on previously published work

Editorial board


  • Prof. Dr. Evangelos Gogolides
    Institute of Nanoscience and Nanotechnology, Aghia Paraskevi, 15310, Athens, Greece

Editor Special Issues

  • Prof. Dr. Jin-Woo Choi
    Louisiana State University, Baton Rouge, Louisiana, United States

Area Editors

  • Prof. Dr. Maan Alkaisi
    University of Canterbury, 8140, Christchurch, New Zealand
  • Dr. Joel M. Barnett
    Tokyo Electron US Holdings Inc, Austin, Texas, , United States
  • Professor Joan Bausells
    National Centre of Microelectronics, 08193, Bellaterra, Spain
  • Prof. Dr. Ahmed Busnaina
    Northeastern University Center for High-rate Nanomanufacturing, 467 Egan Bldg, Boston, Massachusetts, MA 02115, United States
  • Prof. Dr. Yifang Chen
    Fudan University School of Information Science and Engineering, 220 Han Dan Road, 200433, Shanghai, China
  • Prof. Dr. Vassilios Constantoudis
    Institute of Nanoscience and Nanotechnology, Aghia Paraskevi, 15310, Athens, Greece
  • Prof. Dr. Uros Cvelbar
    Jozef Stefan Institute, 1000, Ljubljana, Slovenia
  • Prof. Dr. Maxime Darnon
    University of Sherbrooke, Sherbrooke, J1K 2R1, Quebec, Canada
  • Prof. Dr. Wim De Malsche
    VUB University, 1050, Brussel, Belgium
  • Dr. Christophe Detavernier
    Ghent University, 9000, Gent, Belgium
  • Prof. Dr. Huigao Duan
    Hunan University College of Mechanical and Vehicle Engineering, College of Mechanical and Vehicle Engineering, Hunan University, 410082, Changsha, Hunan, China
  • Dr. Irene Fernandez-Cuesta
    University of Hamburg, 20148, Hamburg, Germany
  • Prof. Dr. Chien-Chong Hong
    National Tsing Hua University Department of Power Mechanical Engineering, No. 101, Section 2, Kuang-Fu Road, 30013, Hsinchu, Taiwan
  • Prof. Dr. Beomjoon Kim
    The University of Tokyo, Bunkyo-Ku, 113-0033, Tokyo, Japan
  • Prof. Dr. Dong Sung Kim
    Pohang University of Science and Technology Department of Mechanical Engineering, 77 Cheongam-Ro, Nam-Gu, 37673, Pohang, South Korea
  • Professor Wu LU
    Ohio State University Department of Electrical and Computer Engineering, 205 Dreese Labs; 2015 Neil Avenue, Columbus, Ohio, 43210, United States
  • Prof. Dr. Mario Lanza
    Institute of Functional Nano and Soft Materials, Suzhou, China
  • Prof. Dr. Jaejong Lee
    Korea Institute of Machinery and Materials Nano-Convergence Mechanical Systems Research Division, 156 Gajeongbuk-Ro, 305-343, Daejeon, Korea, Republic of
  • Dr. Sangho Lee
    Korea Insitiute of Industrial Technology, Ansan-si, Korea, Republic of
  • Dr. Rodolphe Marie
    Technical University of Denmark, 2800, Kgs Lyngby, Denmark
  • Dr. Jean Francois de Marneffe
    Interuniversity Micro-Electronic Centre, 3001, Leuven, Belgium
  • Dr. Sunggook Park
    Louisiana State University Department of Mechanical & Industrial Engineering, 2514B Patrick F. Taylor Hall, Baton Rouge, Louisiana, 70803, United States
  • Prof. Dr. Fransesc Pérez-Murano
    Microelectronics Institute of Barcelona, E-08193, Cerdanyola del Valles, Spain
  • Dr. Edward Song
    University of New Hampshire, Department of Electrical and Computer Engineering, Durham, NH 03824, United States
  • Prof. Dr. Li Tao
    Southeast University School of Materials Science and Engineering, Nanjing, China
  • Prof. Dr. Dimitris Tsoukalas
    National Metsovian Polytechnic, 157 80, Zografos, Greece
  • Prof. Dr. Jeroen Van Kan
    National University of Singapore, 119260, Singapore
  • Prof. Dr. Shaowei Wang
    Shanghai Institute of Technical Physics Chinese Academy of Sciences, 188 Xinlai Rd, Jiading Qu, 201815, Shanghai Shi, China
  • Prof. Dr. Sheng-Joue Young
    National Formosa University, 632, Huwei, Taiwan
  • Dr. Rosa Córdoba
    University of Valencia Institute of Molecular Science, Paterna, Spain

Advisory Editors, Europe

  • Professor Nuria Barniol
    Autonomous University of Barcelona, Barcelona, Spain
  • Dr. Holger Becker
    Microfluidic ChipShop GmbH, Jena, Germany
  • Dr. Hubert Brückl
    Danube University Krems Department for Integrated Sensor Systems, Krems, Austria
  • Prof. Dr. Yong Chen
    University College Paris, Paris, France
  • Professor Massimo De Vittorio
    University of Salento, Lecce, Italy
  • Dr. Michel Despont
    CSEM Zurich, Zurich, Switzerland
  • Dr. Zahid A. K. Durrani
    Imperial College London, London, United Kingdom
  • Dr. Thomas Ernst
    French Alternative Energies and Atomic Energy Commission Electronics and Information Technology Laboratory, Grenoble, France
  • Dr. Maria Farsari
    Foundation of Research and Technology Hellas Library, Irakleio, Greece
  • Prof. Dr. Guglielmo Fortunato
    Institute for Microelectronics and Microsystems National Research Council, Catania, Italy
  • Dr. Nikolaj Gadegaard
    University of Glasgow, Glasgow, Scotland, United Kingdom
  • Dr. Jim Greer
    University College Cork National University of Ireland, Cork, Ireland
  • Dr. Cornelis Wouter Hagen
    TU Delft, Delft, Netherlands
  • Dr. Mervyn E. Jones
    Imperial College London, London, United Kingdom
  • Prof. Dr. Dieter Kern
    Eberhard Karls University Tübingen, Munich, Germany
  • Dr. Salvo Mirabella
    University of Catania, Catania, Italy
  • Dr. David Peyrade
    Microelectronic Technology Laboratory, Grenoble, France
  • Dr. Ivo Rangelow
    Ilmenau University of Technology, Ilmenau, Germany
  • Dr. Helmut Schift
    Paul Scherrer Institute, Villigen, Switzerland
  • Prof. Dr. Urs Staufer
    TU Delft, Delft, Netherlands
  • Dr. Maria Tenje
    Uppsala University, Uppsala, Sweden
  • Dr. Christophe Vieu
    Toulouse School of Engineering, Toulouse, France

Advisory Editors, America

  • Dr. Mohamed Chaker
    National Institute of Scientific Research, Quebec, Quebec, Canada
  • Dr. Panos Datskos
    Oak Ridge National Laboratory, Oak Ridge, Tennessee, United States
  • Professor Demetre Economou
    University of Houston, Houston, Texas, United States
  • Dr. Stephane Evoy
    University of Alberta, Edmonton, Alberta, Canada
  • Dr. Gregg Gallatin
    Applied Math Solutions LLC, Newtown, Connecticut, United States
  • Mr. John Hartley
    Nuflare Technology America Inc, Sunnyvale, California, United States
  • Dr. Patrick Naulleau
    E O Lawrence Berkeley National Laboratory, Berkeley, California, United States
  • Professor Ian Papautsky
    University of Illinois at Chicago, Chicago, Illinois, United States
  • Professor Kimberly Turner
    University of California Santa Barbara, Santa Barbara, California, United States
  • Professor Joseph Wang
    University of California San Diego, La Jolla, California, United States

Advisory Editors, Asia-Oceania

  • Dr. Hsuen-Li Chen
    National Taiwan University, Taipei, Taiwan
  • Dr. Toshiaki Iwamatsu
    Renesas Electronics Corporation, Koto-Ku, Japan
  • Dr. Ran Liu
    Fudan University, Shanghai, China
  • Professor Hidenori Mimura
    Shizuoka University Research Institute of Electronics, Hamamatsu, Japan
  • Professor Dacheng Wei
    Fudan University, Shanghai, China

Assistant to Editor-in-Chief

  • Ms. Maria Martha Tzianou
    Institute of Nanoscience and Nanotechnology, Athens, Greece