Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications and theoretical studies of functional materials and devices for (opto)electronics, sensors, detectors, biotechnology and green energy.

Each issue will aim to provide a snapshot of current insights, new achievements, breakthroughs and future trends in such diverse fields as microelectronics, energy conversion and storage, communications, biotechnology, (photo)catalysis, nano- and thin-film technology, hybrid and composite materials, chemical processing, vapor-phase deposition, device fabrication, and modelling, which are the backbone of advanced semiconductor processing and applications.

Coverage will include: advanced lithography for submicron devices; etching and related topics; ion implantation; damage evolution and related issues; plasma and thermal CVD; rapid thermal processing; advanced metallization and interconnect schemes; thin dielectric layers, oxidation; sol-gel processing; chemical bath and (electro)chemical deposition; compound semiconductor processing; new non-oxide materials and their applications; (macro)molecular and hybrid materials; molecular dynamics, ab-initio methods, Monte Carlo, etc.; new materials and processes for discrete and integrated circuits; magnetic materials and spintronics; heterostructures and quantum devices; engineering of the electrical and optical properties of semiconductors; crystal growth mechanisms; reliability, defect density, intrinsic impurities and defects.Submit your manuscript

Editorial board

Editor in Chief

  • Professor Steven M. Durbin
    Western Michigan University, United States


  • Professor Kuan Yew Cheong
    Universiti Sains Malaysia School of Materials and Mineral Resources Engineering, Malaysia
  • Dr. Aracely Hernández Ramírez
    Autonomous University of Nuevo Leon Faculty of Chemical Sciences, Mexico
  • Professor Masaya Ichimura
    Nagoya Institute of Technology, Japan
  • Dr. Giuliana Impellizzeri
    National Research Council, Italy
  • Dr. Jon Major
    University of Liverpool, United Kingdom
  • Prof. Dr. Andre Schleife PhD
    University of Illinois at Urbana-Champaign Department of Materials Science and Engineering, United States

Associate Editor

  • Assist. Prof. Deidra R. Hodges PhD
    The University of Texas at El Paso Department of Electrical and Computer Engineering, El Paso, Texas, United States

Chair of the International Editorial Board

  • Dr. Aloysius F. Hepp Editor-in-Chief Emeritus
    NASA John H Glenn Research Center, United States

International Editorial Board

  • Professor M.S. Aida
    University of Constantine 1, Algeria
  • Dr. James Aldous
    University of Cambridge, United Kingdom
  • Dr. Guilhem Almuneau
    Laboratory for Systems Analysis and Architecture, France
  • Professor Delaina A. Amos
    University of Louisville, United States
  • Dr. Annick Anctil
    Michigan State University, United States
  • Dr. Christopher Bailey
    Old Dominion University, United States
  • Dr. Andrew R. Barron
    Rice University, United States
  • Professor Kanisha Biswas
    Jawaharlal Nehru Centre for Advanced Scientific Research, India
  • Dr. Hartmut Bracht
    University of Münster, Germany
  • Dr. Xian-An (Andrew) Cao
    West Virginia University, United States
  • Dr. L.S. Cavalcante
    State University of Piaui Natural Sciences Centre, Brazil
  • Dr. M.V.S. Chandrashekhar
    University of South Carolina, United States
  • Professor Albert Chawanda
    Midlands State University, Zimbabwe
  • Professor Lung-Chien Chen
    National Taipei University of Technology, Taiwan
  • Dr. Russell R. Chianelli
    University of Texas at El Paso, United States
  • Professor Oana Cojocaru-Mirédin
    Max Planck Institute for Iron Research GmbH, Germany
  • Professor Ana Cros Stötter
    University of Valencia, Spain
  • Professor Carl Cui
    The University of Sydney, Australia
  • Dr. Mmantsae Diale
    University of Pretoria Department of Physics, South Africa
  • Dr. Ray Duffy
    University College Cork National University of Ireland, Ireland
  • Professor Ken Durose
    University of Liverpool, United Kingdom
  • Professor Moshe Eizenberg
    Technion Israel Institute of Technology, Israel
  • Professor Ayse Erol
    Istanbul University, Turkey
  • Professor Mark Fink
    Tulane University, United States
  • Dr. Dennis J. Flood
    Natcore Technology, United States
  • Dr. Mariana Amorim Fraga
    Technological Institute of Aviation, Brazil
  • Dr. Alex Freundlich
    University of Houston, United States
  • Dr. Karol Fröhlich
    Slovak Academy of Sciences, Slovakia
  • Professor Louis J. Guido
    Virginia Tech University Bookstore, United States
  • Professor Parameswar Hari
    University of Tulsa, United States
  • Prof. Dr. Zsolt Horvath
    Hungarian Academy of Sciences, Hungary
  • Professor W. Chris Hughes
    James Madison University, United States
  • Professor Masaya Ichimura
    Nagoya Institute of Technology, Japan
  • Dr. Michael Jin
    Johns Hopkins University Applied Physics Laboratory Information Group, United States
  • Dr. Richard Paul Owen Jones
    Anglia Ruskin University Global Sustainability Institute, United Kingdom
  • Dr. Satoshi Kaneco
    Mie University Graduate School of Engineering Faculty of Engineering Department of Chemistry for Materials, Japan
  • Professor Zhenhui Kang
    Soochow University, China
  • Dr. Manish Keswani
    University of Arizona, United States
  • Professor Malle Krunks
    Tallinn University of Technology, Estonia
  • Professor Clifford P. Kubiak
    University of California San Diego Department of Chemistry and Biochemistry, United States
  • Professor Prashant N. Kumta
    University of Pittsburgh, United States
  • Dr. Marian Lehocky
    Tomas Bata University in Zlin, Czech Republic
  • Professor Markku Leskalä
    University of Helsinki, Finland
  • Professor Xiuling Li
    University of Illinois at Urbana-Champaign, United States
  • Professor Oleg Lupan
    Technical University of Moldova, Moldova
  • Dr. Tae Young Ma
    Gyeongsang National University, The Republic of Korea
  • Dr. Jeffrey Maranchi
    Johns Hopkins University Applied Physics Laboratory Information Group, United States
  • Dr. Ricardo Marotti Priero
    University of the Republic Uruguay, Uruguay
  • Professor Miguel Angel Meléndez-Lira
    Center for Research and Advanced Studies of the National Polytechnic Institute Physics Department, Mexico
  • Dr. Enrico Napolitani
    University of Padua, Italy
  • Dr. Michael Nolan
    University College Cork National University of Ireland, Ireland
  • Dr. Jozef Novák
    Slovak Academy of Sciences, Slovakia
  • Dr. Nurxat Nuraje
  • Dr. Michael Osofsky
    US Naval Research Laboratory, United States
  • Dr. Jozef Osvald
    Slovak Academy of Sciences, Slovakia
  • Dr. Hyunwoong Park
    Kyungpook National University, The Republic of Korea
  • Dr. Albena Paskaleva
    Bulgarian Academy of Sciences, Bulgaria
  • Dr. Sebastian Patzig-Klein
    RENA Technologies GmbH Solar Technologie Center Freiburg, Germany
  • Dr. Ioannis Poulios
    Aristotle University of Thessaloniki, Greece
  • Dr. Aswini Pradhan
    Norfolk State University, United States
  • Dr. Peter Psarras
  • Dr. Ryne Raffaelle
    Rochester Institute of Technology, United States
  • Dr. Manoj Kumar Ram
    University of South Florida, United States
  • Dr. Thomas Riedl
    University of Wuppertal, Germany
  • Professor Judy Rorison
    University of Bristol, United Kingdom
  • Professor Mehmet Sahiner
    Seton Hall University, United States
  • Dr. David Schiraldi
  • Dr. Azzouz Sellai
    Sultan Qaboos University, Oman
  • Dr. Tejinder Singh
    Intel Corp Hawthorn Farm, United States
  • Professor Elias Stathatos
    Western Greece University of Applied Sciences Department of Electrical Engineering, Greece
  • Dr. Rajagopalan Thiruvengadathan
    Amrita Vishwa Vidyapeetham, India
  • Dr. Joanna Trojan-Piegza
    Wroclaw University of Science and Technology, Poland
  • Dr. Abdulmecit Türüt
    Istanbul Medeniyet University, Turkey
  • Dr. Subramaniam Velumani
    Center for Research and Advanced Studies of the National Polytechnic Institute, Mexico
  • Dr. Purakh Raj Verma
    GlobalFoundries Inc Sunnyvale, United States
  • Professor James Williams
    Australian National University, Australia
  • Professor Maggie Xia
    The University of British Columbia, Canada
  • Dr. Lidong Zhao
    Beihang University, China
  • Dr. Tsvetanka Zheleva
    US Army Research Laboratory, United States
  • Dr. Rongkun Zheng
    The University of Sydney, Australia